The reaction mechanism of chemicalbath is been studied.
对常规化学浴的反应机理进行了分析。
2
At the end, the excess soft resin is cleaned away using a chemicalbath.
最后,多余的软树脂会用化学试剂冲掉。
3
Then the wafer is sent through a chemicalbath that etches trenches into the exposed substrate, while leaving the areas covered by the photoresist untouched.