Comparing with the conventional cold glow discharge, the hot cathodeglow discharge is a new type of gas discharge.
相对于常规冷阴极辉光放电而言，热阴极辉光放电是一种新型放电形式。
2
Large current hot cathodeglow discharge was used for plasma chemical vapor deposition of diamond films. It improved deposition rate and films quality efficiently.
大电流热阴极辉光放电用于等离子体化学气相沉积金刚石膜，有效地提高了沉积速率和膜品质。
3
The relation between characteristics of hot cathodeglow discharge and diamond film deposition techniques in hot cathodeglow discharge plasma chemical vapor deposition process was discussed.