The instrument of filtered cathodearc deposition is successfully built in our laboratory. Diamond-like carbon film is maded.
研制了一套过滤式阴极电弧沉积设备，并利用该设备成功地获得了类金刚石薄膜。
2
The differences of discharge characteristics between the hollow cathodearc under low pressure and the conventional TIG arc under atmosphere are discussed.
The plasma source ion implantation device consists of pulsed negative high voltage power, hot cathodearc discharge system, vacuum chamber and target stage, vacuum system and monitor system.