Topics include the use of experimental design and response surface modeling to understand manufacturing process physics, as well as defect and parametric yield modeling and optimization.
主题包括使用实验设计和响应曲面造型，了解制造过程的物理，以及缺陷和产量建模和参数优化。
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Since pure radioactive ion beam can be implanted into material directly, research on solid physics especially on impurity and defect in semiconductor become possible.