The experience formula, which can better describe the fabrication errors of the deep etched binaryoptics element, is presented.
将深刻蚀二元光学元件与一般二元光学元件制作误差规律的不同之处进行了分析说明；
2
Based on the phase modulation of binaryoptics, the binary phase only masks are used to couple the elliptical Gaussian beam to single mode fiber.
采用二元光学位相调制的基本思想，用二元纯位相型光学系统将椭圆高斯型激光束与单模光纤最佳耦合。
3
Based on the theory of scalar diffraction, an error model is established to investigate the effect of alignment error on the efficiency of binaryoptics elements.