A reflecting hologram diffraction grating was fixed to the stage to form a closed loop displacement measuring system.
固定在工作台上的全息衍射光栅实现了对工作台位移的高精度闭环检测。
2
The paper has introduced the theory of measurement and whole constitute of the system including laser scan inspection system and grating displacement closed loop inspection system.
文中介绍了光电二维自动检测仪的测量原理和系统构成，包括激光扫描系统、光栅位移检测闭环控制系统。
3
A design method of microcomputer closed-loop scanning and control system based on grating check is presented.