The methods and results for the 5 main parameters of energy, beam current, dose uniformity, beam scanning width, and beam profile were given.
给出了能量、流强、扫描均匀性、扫描长度以及束斑形状等5个重要参数的测量方法及结果。
2
Developed a feeding nozzle which have four double-feeding pipes with co-axial shaping gas distributes on circle orientation of laser beam with uniformity and symmetry.
研制了一种在以激光束为中心轴的圆周方向均匀对称分布四个具有同轴汇聚气的双层送粉管的送粉喷嘴。
3
Meanwhile, Developed ionic beam machine with multiple functions for the ion implantation into the material of aero-bearing solved the problem of non-uniformity implantation on spherical surface.