In this paper, conventional testing methods were summarized. An interferometer was designed based on the schematic of zone-plate with a total optical path for testing aspheric surfaces.
本文针对非球面高精度检测,在总结现有检测方法的基础上,设计了基于波带板干涉法的共光路干涉系统。
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A new kind of interferometer-Fresnel zoneplateinterferometer-is described.