The stroke volumeofthechamber is enlarged when the thickness of aluminum membrane is increased or that of silicon membrane is decreased.
减薄硅膜厚度和增加铝膜的厚度也能增大泵腔体积变化量。
2
Then the different damped oscillation curves and over-damped monotonic decay curves can be obtained for various diameter and length ofthe pressured tube and various volumeofthechamber.