In this paper, two kinds of pure tungstentarget are studied and compared by using SEM, EDS and chemical elements tests.
采用SEM、EDS和化学成分测试等方法,对两种钨靶进行了研究和比较。
2
In this paper, WO3 thin film was deposited on glass substrate and silicon slice by DC reactive magnetron sputtering and using metal tungsten as target.
本文采用直流反应磁控溅射工艺,以金属钨为靶材,在玻璃和单晶硅片上沉积了WO 3薄膜。
3
It is described a filter (300) for at least partially compensating for an X-ray tube (10) the target Angle heel effect and preserving the tungsten spectrum of the X-rays.