Hot cathode chemical vapordepositionmethod was established in order to deposit high-quality diamond films with high deposition rate.
为快速沉积高品质金刚石膜，建立了热阴极等离子体化学气相沉积方法。
2
Carbon nanotubes filled with metal were synthesized through chemical vapordepositionmethod, and the structure were studied by electron microscopy.
本文系统介绍了金属填充碳纳米管的化学气相沉积制备与电子显微学研究。
3
Finally, annealing process is carried out in the electroplated metal layer formed by the electroplating process through chemical vapordepositionmethod under promotion of ammonia plasma.