Alignment signal of phase grating alignmentmark and the factors of influece of alignment signal are analysed secondly;
其次分析影响相位光栅对准标记衍射效率的主要因素槽深、占空比和反射率；
2
From the results of experimentation, the method can make the mark image edge achieve good edge localization and improve the alignment precision.
从实验的结果来看，这种方法能够对对准标记达到很好的边缘定位，提高了对准精度。
3
Refers to the suture line, the provincial line, fold line and so on the intersection of a short line, in order to imply that the suture is connected, as a mark of line alignment.