The trench linewidth difference provides an efficient method for fabricating the trenchcapacitor and the trench resistor.
沟槽线宽差异提供了制造沟槽电容器和沟道电阻器的有效方法。
2
A structure and a method for fabrication of the structure use a capacitortrench (ct) for a trenchcapacitor and a resistor trench (RT) for a trench resistor.