Liquid nitrogen is adopted as protective atmosphere in bell type furnace for which vacuumpumpingsystem are provide also.
在罩式电炉内处理,采取液氮作为保护气体,并设真空抽气设备。
2
At the appropriate pressure, the chamber is opened to a high-vacuumpumpingsystem that continues to reduce the pressure of the process chamber.
在适当的压强下,工艺室被接通高真空泵系统抽气,以继续降低工艺室的压强。
3
In addition to pumping air and no condensate and other non-corrosive gases, widely used in pumping speed and the need for high vacuum of truth in this system.