The multi-stage vacuum system and gaseous secondary electron detector(GSED) for environmental scanning electron microscope(ESEM) were simply introduced and the basic principle of ESEM was discussed.
The vacuum and heat preserving apparatus of BGO detector using steam compressing are introduced, and temperature effect on energy resolution of BGO detector are discussed.
采用蒸汽压缩式制冷方法制作了BGO探测器真空保温系统，并探讨了温度对BGO探测器能量分辨率的影响。
3
The integrated Pirani vacuum sensor system in this work can be applied for the gas pressure detector in the medium and rough vacuum measurement.