In the system the digital is controlled by PLC, digital is mainly used to control the switch data of pipeline in the vacuumsystem and metallurgical vessel and CVD vessel.
The control of ionization gauge controlled by a single board computer, which is used in vacuumsystem, is described in this paper.
本文介绍用单片机控制的电离计对真空系统的控制方法。
3
Mechanical vacuum pump is an important part of vacuumsystem. The vibration of pump must be controlled strictly, because it indicates the level of pump design and manufacture.