The present invention relates to a vacuum covering equipment which is provided with a transmission system for the plate substrate that is transmitted through a vacuumchamber.
本发明涉及一种真空涂覆设备，其具有用于平板衬底的传输系统，平 板衬底被传输通过真空室。
2
Plasma was instantly produced after the interaction between the air and the YAG laser pulse quadruple output in the interspace of parallel-plate electrodes in the vacuumchamber.
采用YAG脉冲激光的四倍频输出与两平行平面极板间空气相互作用产生等离子体。
3
The flat platevacuum glass is composed of double-layer flat plate glass which is sealed on periphery and then is internally provided with a vacuumchamber.