The prepared films were treated by vacuumannealing, and the structure of films before and after annealing was studied by Raman Spectrum.
对制备的薄膜进行了真空退火处理，并对退火前后的薄膜进行了拉曼结构分析。
3
The accurate control of the work pieces temperature in vacuumannealing furnace is a typical nonlinear large time delay and cross coupling complicated problem.