The design method of vibration can be used as the reference to ultraprecisionmachinetool, supe...
此隔振设计方法对超精密机床、超微定位机构等超低传递率隔振设计有一定的参考价值。
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On the basis of analysis on error model of ultraprecision CNC machinetool, the variant gain cross coupling control algorithm is introduced into the servo control of ultraprecision CNC machinetool.
文章在分析超精密数控机床误差模型的基础上，将变增益交叉耦合控制算法引入超精密数控机床的伺服控制。
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Accurately position measuring of online measuring system is the key in developing of ultra-precisionmachinetool.