An error compensation control method which can improve contour tracing accuracy of aspherical surface ultraprecise machine is introduced.
介绍了一种可提高非球曲面超精密加工机床的轮廓跟踪精度的误差补偿控制方法。
2
Scanning probe microscope (SPM) is used not only for measuring the micro profiles of surfaces, but also for nano ultraprecise machining and atom manipulation now.
扫描探针显微镜(SPM)现在不仅用于表面微观形貌的检测，同时也用于纳米超精密加工和原子操纵。
3
It has also discussed the machining mechanics and the possible machining equipments and the error compensation technique about the ultraprecise machining technique.