Wafer fabrication is one of the most complex and high competence manufacturing. How to fully utilize the machine capacity to meet customer demand is a very important topic.
Vacuum clamp technologies are studied thoughtfully on a grinding machine which is based on wafer rotating grinding methods.
本文研究了硅片自旋转磨削中的真空夹持技术。
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Mainly applies in the print circuit wafer, is electronics industries and so on the electronic accounting machine as well as communication equipment the essential foundation material.