The parameters deciding the quality in polishing process are as follows: slurry, temperature, wafering time, and so on.
抛光过程中决定抛光质量的参数有：抛光浆体、抛光温度、抛光时间等。
2
Thirdly, the parameters deciding the quality in polishing process are as follows: slurry, polish pad, pressure, temperature, rotation speed, wafering time, and so on.