The depth of diffusion junction(Xj)is one of the most important parameters in waferFab.
在半导体芯片制造过程中，结深是重要的工艺参数之一。
2
At present, the proposed method has been applied to the actual waferfab with better performance.
目前，该方法已在某实际半导体生产线中应用并取得了良好的效果。
3
Some design principles for rebuilding the special gases system of a waferfab are described. Engineering regulations for rebuilding the tubing system are discussed in detail.