The design and fabrication of high aspect-ratio hard X-ray zone plates by X-raylithography are studied.
对利用X射线光刻制作大高宽比硬x射线波带片的设计和制作工艺进行了研究。
2
The fabrication of X-ray stencil silicon mask and its application in X-ray deep lithography are presented in this paper.
阐述了X射线镂空硅掩模的研制及其在同步辐射深层光刻中的应用。
3
The manufacture of high-line-density X-ray transmission gratings for X-ray spectroscopy by using electron beam lithography and X-raylithography was reported.