The design and fabrication of high aspect-ratio hard X-ray zone plates by X-raylithography are studied.
对利用X射线光刻制作大高宽比硬x射线波带片的设计和制作工艺进行了研究。
2
In synchrotron radiation X-Raylithography, distortion of mask is caused by its initial tension, stress and inhomogeneous thermal effect.
在同步辐射X射线光刻中，由于掩模的初始张应力和掩膜的非均匀受热将使掩模产生热畸变。
3
The manufacture of high-line-density X-ray transmission gratings for X-ray spectroscopy by using electron beam lithography and X-raylithography was reported.