Several quantitative drift measurement techniques for scanning probe microscopy (SPM) were introduced. A new method using two-dimensional zero-reference masks was proposed to measure the SPM drift.
对扫描探针显微镜(SPM)仪器漂移的定量测量的几种方法进行探讨，提出应用二维零位标记进行漂移测量。
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The 5-hole spherical probe is applied on the on-the-spot measurement of two-way pumping station.