Motor converter with two rotor cores between the two Supports makes their total deflection increased, since the motor and the generator will affect each other.

The sensor has the advantage of simple configuration, wide linear range and less critical requirement on light source compared with sensors based-on total deflection principle.

We present an analytical solution for the total stress and mechanical sensitivity of highly boron doped si diaphragm with small deflection considering effect to result from the residual stress.