The particular requirement on substrate materials selecting, thinfilmstructure design and monitor and control of thinfilm thickness has been discussed.
讨论了在基底材料选择、膜系设计以及膜厚监控等方面要求的特殊性,并给出了一些滤光片设计和监控的要求。
2
The property of the near field subwavelength imaging in a metal thin-filmstructure is investigated using finite difference time domain method based on Drude model.