This paper reports the formation of the semiconductor CO2 thin-film and the structure, sensitivity, stability, temperature characteristic and response property of this sensing film.
报导了半导体薄膜CO2气体敏感膜的制备，敏感膜的结构特性、温度特性、灵敏度及响应特性和稳定度。
2
Physical vapor deposition in horizontal systems has been used for the growth of crystal thin-film of organic semiconductor pentacene.
用物理气相沉积法在水平系统中生长有机半导体并五苯晶体薄膜。
3
The study of the thin-film structure and morphology during the thin-film growth has practical application in many areas, in particular in semiconductor industry.