An in-situ optical monitoring system for thinfilm deposition is introduced. The components of the system, functions and working principles of each module are analyzed.
介绍了一种薄膜制造实时光学监控系统，对监控系统的组成及各个模块的功能和工作原理进行分析。
2
This paper presents the basic design principle, the assembly and the application of several components of opticalthinfilm used for meteorological satellite.
本文介绍几种用于气象卫星的光学薄膜器件的基本设计原理、结构及用途。
3
The residual stress is an important factor for optic thinfilm quality, and it has an adverse effect on the opticalcomponents.