The size distribution of the fault is gotten based on the data from the double bridge teststructure.
首先基于双桥微电子测试结构,通过具体制造工艺得到数据,然后处理得到故障的粒径分布。
2
Finally, a miniature teststructure for RF device characterization and process monitoring is also proposed.
最后,一通用于射频元件特性分析与制程监测的微型化测试结构亦被提出。
3
According to the practical situation, this paper provides design scheme of the controllability of shut-off valve, and proofs its feasibility by teststructure.