By microwave designing for substrateheating materials, the larger uniform temperature field areas than the diameter of substrate holder in MPCVD device is obtained.
通过对基片加热材料的微波设计，在MPCVD装置中获得大于基片台直径的均匀温度分布区。
2
Under the given conditions, we can get films of columnar crystals of growth of single direction by controlled heating of substrate.
试验结果表明，在一定的工艺条件下，通过对基片的加热控制可以获得单一方向生长的柱状晶结构薄膜。
3
Aluminum film is produced on glass, H13 steel, plastic and pure cu substrate by resistance heating vacuum evaporation, and the adhesive power of aluminum film is determined and analyzed.