In this article, deep submicronlithography and nano processing are reviewed.
本文综述了深亚微米光刻和纳米光刻技术。
2
Experimental results of deep submicronlithography with a excimer laser are reported in this paper.
报道用远紫外准分子激光进行亚微米光刻的实验结果。
3
The earlier research has been focused on modeling thin chemically amplified photoresist for submicronlithography and little has been made on modeling thick chemically amplified photoresist.