The results were discussed according to the influence of skew incidence Angle on atomic mixing, thermalspike, internal stress and the formation of metastable structures.
从理论上讨论了离子束入射角度对原子混合、热峰效应、薄膜内应力及亚稳结构形成的影响。
2
The results show that no matter the range of the implanted ion itself or secondary effect sphere of secondary electrons, radical diffusion, thermalspike, cascade atoms and shock wave etc.