The thermalconductivitysensor integrating MEMS and semi-conductor technique can effectively enhance the measuring precision and reliability of the instrument.
本实用新型采用运用MEMS 技术和半导体工艺集成而成的热导传感器,有效提高了测量精度和可靠性;
2
In order to overcome the disadvantages of traditional method of gas concentration detection, a new method is proposed which keeps thermalconductivitysensor at a constant temperature.