Combining magnetron sputteringtechnology designs and makes membrane porous silicon sensor, it has good resistance and capacitance response when adsorbs alcohol.
结合磁控溅射技术设计制作了薄膜型多孔硅乙醇气敏元件，吸附乙醇时具有良好的电阻和电容响应。
2
Magnetron SputteringTechnology has been applied in the field of film preparing widely, however, the quality of the film is influenced by stability of target current badly.
磁控溅射技术在薄膜制备领域的应用十分广泛，而溅射靶电流的稳定性极大的影响溅射镀膜的膜层质量。
3
The coatings deposited by magnetron sputteringtechnology have good corrosion and wear resistance. This technique shows optimistic development trend in the field of magnesium alloys surface treatment.