Niobium oxide optical thin films have been prepared by low frequency reactive magnetron sputteringsystem.
利用低频反应磁控溅射制备五氧化二铌光学薄膜。
2
Using high vacuum magnetron sputteringsystem, it is coated sensitive film on the optical fiber end face, silicon, glass.
并采用高真空磁控溅射镀膜技术将敏感膜溅射在光纤端面、硅片、有机玻璃上。
3
Diamond-like carbon DLC thin films were deposited onto si 100 and high speed steel substrates by mid-frequency magnetron sputteringsystem SP0806AS, Beijing Power tech Co.