Three pole reaction sputtering has the properties of simple equipment, easy process and fined film.
三极反应溅射具有设备简单，工艺简便，镀层致密等特点。
2
Comparing with general sputtering method, this equipment has the advantages of decreasing the sputtering voltage and increasing the rate of deposition obviously.
与普通溅射方法相比，本设备的优点是：溅射电压大大降低，而淀积速率提高很多。
3
The technology and equipment of the vacuum sputtering coating have the extremely broad application and the development in the future.