The technology and equipment of the vacuum sputteringcoating have the extremely broad application and the development in the future.
真空溅射镀膜技术及设备在当今和未来都拥有十分广阔的应用领域和发展前景。
2
Based on the low evaporation temperature of organic semiconductors, a radioactive heater-crucible assembly was developed for vacuum evaporation coating and sputteringcoating systems.
针对有机半导体材料的蒸发温度低的特点，设计并制作了低温辐射式加热器。
3
Further more, the increase of B reduced greatly the touching off and keeping discharge voltages during magnetron sputteringcoating, which gives another approach to lower voltage magnetron sputtering.