X-ray diffraction (XRD) analysis shows that the as-sputteredfilm is almost amorphous while new phases V2O5(0 0 1), VO2(0 1 1, 1 -1 0) and V2O3(1 1 3) appear in the annealed films.
The X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM) and selected area electron diffraction (SAED) results indicate that the sputteredfilm has an amorphous structure.