When the anode plate is used in sputtering DLC coating, no wrapping structures are formed in the edges of the substrate and the sputteredcoating is firm with less falling off.
利用本发明的阳极板溅镀dlc膜层，在基材表面边缘处不产生包覆结构，膜层不易脱落。
2
The process begins with a four-inch silicon wafer. A coating of metal is added and sputtered across the wafer.
该过程刚开始是利用一个四英寸的硅晶片，然后在其表面溅射一层金属涂层。
3
The thermal stress in magnetron sputtered al coating on uranium substrate was studied by thermal elastic plastic finite element method (FEM).