Vacuum sputtercoating has better stability than smearing film while smearing film has better response electric characteristics than vacuum sputtercoating.
真空镀膜稳定性比涂膜好，涂膜的响应、导电性比真空镀膜好。
2
The heating equipment of vacuum sputtercoating apparatus always sparks during sputtering, Using metal-screening and surface earth can solve this problem well.
This article introduces processing of plasma chemistry and application of sputtercoating and plasma-enhanced chemical vapor deposition in powder metallurgy especially.