The new concept of the vacuum pipe sputter self-coating is introduced first, and special cathode target structure is introduced to get favorable coating.
This article introduces processing of plasma chemistry and application of sputtercoating and plasma-enhanced chemical vapor deposition in powder metallurgy especially.
介绍了等离子体化学工艺，特别着重介绍了溅射镀膜与等离子体化学气相沉积在粉末冶金中的应用。
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The heating equipment of vacuum sputtercoating apparatus always sparks during sputtering, Using metal-screening and surface earth can solve this problem well.