We inscribed surface relief grating on the thin films using Point-by-Point method and amplitude mask method (the amplitude mask was taken place by grating roll film manufactured by ourselves).

The method of stack velocity analysis based on relief surface presented in the paper uses double-square-root equation to compute the travel time of reflections, which is suitable to use in the area w.

The displacement vector for surface relief was determined to be near the invariant line direction using electron back scattering diffraction method.