Strained silicon is a fundamental component of all recent microprocessors. The reason for its success is that local strain-induced deformation in the crystal lattice improves processor performance.
“变形”硅是所有最新的处理器的基本组成部分,原因是:晶格里应变诱发的形变提升了处理器的性能。
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Epitaxy: Concerns/ constraints- lattice-matched systems; strained layers( pseudomorphic)- limits of thickness; impact of strain on bands, properties.