Impact Analysis of Gaussian Beam on Measurement of Single Crystal Silicon SphereDiameter.
高斯光束对标准硅球直径测量的影响分析。
2
The paper discusses the principle of internal spherediameter measurement on line, composition of the measuring device and the method of the measurement error correcting.
论述了大型内球面直径在线测量的原理、测量系统的组成及误差修正方法。
3
Here, a temperature measurement and control system used in high accuracy spherediameter laser interferometry is introduced, which is based on virtual instrument techniques.