Thereby, the coupling force between the trailing arms and the torsionbeam made of different materials can be improved.
因此, 由不同材料制成的所述纵臂与所述扭转梁之间的接合力可以得到增 强。
2
A novel micromachining torsionbeam optical switch micro- actuator driven by electrostatic force was designed and simulated by means of Finite Element Method (FEM).
报导了一种新型静电驱动扭转梁大位移微机械光开关微动作器的模拟、设计和制作。
3
The switching time calculation method of the electrostatic driven MOEMS optical switch with torsionbeam structure was presented, and the formula of the switching time was given.