On the basis of the equilibrium composition of SFe arc plasma, the emission coefficients of the spectral lines, which were usually chose in the spectral analysis of SF6 arc plasma, were computed.

Spectral lines have been identified. All results indicate that the spectroscopic analysis of atom emission is an effective way to study the state of He plasma under different conditions.

Spectral pattern recognition techniques are employed to suppress the strong and highly varying background to extract the very weak emission features from the compound spectra.