The distribution of rare earth ions embedded into porous silicon films was observed by Rutherfordbackscatteringspectrometry.
用卢瑟福背散射谱分析了稀土离子在多孔硅薄膜中的分布情况。
2
Rutherfordbackscatteringspectrometry (RBS) demonstrates that the concentration of Fe or N atoms varies gradually from the substrate to the surface through the whole thickness of the films.