The invention relates to a method for recycling silicontetrachloride as a by-product of polysilicon, belonging to the technical field of polysilicon production.
本发明涉及多晶硅副产物四氯化硅的回收利用方法，属于多晶硅生产技术领域。
2
The results have shown that the doping profile of the low pressure epitaxy of silane is steeper than those of silane epitaxy and silicontetrachloride epitaxy at atmosphere pressure.
结果表明，与硅烷常压外延和四氯化硅常压外延相比，硅烷低压外延的杂质分布更为陡峭。
3
It is difficult to recycle a large amount of by product, silicontetrachloride, which is the technical bottleneck existing in preparation of polycrystalline silicon by improved Siemens process.